Date

Place

[P2-39]
14:00 ~ 15:30
Title:Increase in Photoconductivity of Silicon Films after BLDA by Back-Reflection Ti Layer for System on Glass
Kota Nakao, Charith Jayanada Koswaththage, Tatsuya Okada, and Takashi Noguchi (Univ. of the Ryukyus, Japan)
Abstract: Multifunctional displays with System on Glass (SoG) have drawn high attention recently due to the high performance and low cost capabilities. So far, high-performance TFT characteristics have been obtained by using Blue Multi Laser Diode Annealing (BLDA) in our group. In terms of realizing SoG, high-performance TFT system with low cost can be possible by integrating sensors with TFTs on a same panel by fabricating the identical process. However, light energy especially in red and infrared region cannot be absorbed enough into thin Si film (50 ~ 100 nm) due to high transmittance. In order to improve photosensitivity, multi-layer structure was proposed, using Ti as a metal back-reflection layer.?
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